EM simulation of inductors/capacitors with high resistivity substrate in CMOS IC technology

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vlsi_design2

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Hi,
I am using a CMOS technology which provides option to change substrate resistivity below the inductors. How to account for this in the EM simulation software? Do I need to manually change the substrate resistivity in the stack? I couldnt find the substrate resistivity in the PDK document.
 

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What EM simulation software do you use?

For 3D planar tools like Momentum or Sonnet or EMX, dielectrics extend over the entire area. Local dielectric inserts are not possible with these tools, so you would indeed need to clone the EM stackup and modify substrate conductivity. Of course, you need to find out the actual value. If it is not documented, your only option is to ask the foundries tech support.
 

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