DRC's difference : 14nm vs 22nm vs 28nm

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ndhingra

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Can any body present a comparative difference about the 14nm, 22nm & 28nm technology in DRC's.
Also details about double patterning.
 

Design Rules will chnage with respect the process node you use.. but when it come to lower tech nodes such as 22nm or 14nm..and 10nm.. will have more number of rules

more than overlaps and metal to metal spacings!!! cut formation will come into picture.. Metal spacings will form a different forms such as X Y D such empty space formation will not be allowed in lower technologies..
it also depends on Fabrication Process..

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