Does anyone know the symbol Er(SiO2) of 130nm proccess?

Status
Not open for further replies.
D

dtzounakos

Member level 3
Joined
Mar 16, 2007
Messages
56
Helped
0
Reputation
0
Reaction score
0
Trophy points
1,286
Activity points
1,662
I go to Print>Model Parameters and window model parameter comes up. Does anyone knows exactly which symblo refers to Er (SiO2)?
 

Er is the relative permittivity. In the model card, this can end
up being a "fudge factor" that is only loosely related to the
material system.

You often see cases where the "optical" Tox and the
"electrical" Tox have diverged. Things like the density
of the grown oxide (if it is in fact even a simple oxide
and not some combination of nitride, hydrogen-loaded
oxide, high-K or whatever) affect the electrical qualities
of the oxide.
 

Status
Not open for further replies.

Similar threads

Menu
Log in
Register
Cookies are required to use this site. You must accept them to continue using the site. Learn more…