I have enough experience, to have come to prefer a triangle
wave & comparators (LM555-style, quite often) for generating
a PWM master ramp signal. Benefits here can include a fair
degree of process / temperature insensitivity, and 0% - 100%
realizable duty cycle, and no fast discharge requirement at
all.
Now, 500MHz -is- fairly sporty and I would not expect much
purity out of the circuit. Consider that 2nS full cycle and a
desire to make a <=10% duty cycle position clean means
a 200pS high phase and in turn a desire for 20pS rise / fall.
That's tough territory for even the highest speed logic.
You're probably feeding this to a comparator somewhere,
which is going to be slower (and more variably slow) at low
overdrive than any bang-bang logic with a well driven input.
And you want an analog waveform to be all tight and pretty
across corners?
I think you might want to step back and think about what
you want for the real outcome - I'd assume this sawtooth
has a small part to play in a larger function, and maybe the
function can be had cleaner with some alternative approach.