Dishing Effect Query

masummist · Oct 26, 2013

Can anyone tell me what is dishing effect?

Thanks

Gayathri Jeyaram · Oct 28, 2013

masummist said:
Can anyone tell me what is dishing effect?

Thanks

The metal nets are not perfect a rectangle when seen cross-sectionally but looks like a dish due to CMP https://en.wikipedia.org/wiki/Chemical-mechanical_planarization

This causes shorts between two metal nets and open in a metal net.

Max density and min density will be defined in the lef file for each metal layer to help avoid problems due to dishing.

kenambo · Oct 28, 2013

Hi,

Metal dishing is defined as the difference between the height of the oxide in the spaces
and that of the metal in the trenches.

It is caused by the Chemical Mechanical Planarisation(chemical Mechanical polishing). This CMP is used in IC fabrication to get ahigh level of planarisation..

It imay be reduced by some Dummy Fill techniques effectively..

Thanks

masummist · Oct 29, 2013

Thanks Gayathri and kenambo

Dishing Effect Query

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Dishing Effect Query

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