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Diffusion of Phosphorus in silicon

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rajuljain

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Hello all,
I am working on sentaurus s process. I have to do Phosphorus diffusion of silicon (not using implantation). There are two steps in diffusion- pre-deposition and then drive-in. Since there is no material like POCl3 or P2O5 in s process, I am facing problem in pre-deposition of PSG (phospho-silicate glass). Could anyone suggest me how to deposit PSG. so that we can diffuse it in drive in process to get diffusion profile.

Thanks
 

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