MIM capacitors basically a parasitic capacitor between the metal layers(MIM -->Metal insulator Metal).Generally CTM mask layer is used for insulation. U will get an accurate capacitance value in this but it takes lot of area.Apart from this we have mos capacitors which is formed between POLY layer and Nwell layer(Poly Nwell Cap) gives more capacitance in less area but the variation is more.
In some process supports PIP capacitor also which is formed between POLY1 and POLY2.