Renil
Newbie level 1
damping parameter
Hi all,
I am confusing with material damping (mass and stiffness damping) in MEMS structures. Mine is a fixed-fixed beam with a mass attached at the center of the beam. during electrostatic actuation it produce some ringing. I am using Intellisuite MEMS cad tool for the dynamic respose analysis of the structure. In which I have to mention mass and stiffness damping parameters to define the damping ratio according to the following equation.
ζ=(α/2ω)+(βω/2)
ζ=Damping ratio
α=Mass damping
β=Stifness damping
ω=Natural frequency
How to deduce α&β from the structural dimension of the above mentioned system.
I will be satisfied if anyone could help me.
Regards
Hi all,
I am confusing with material damping (mass and stiffness damping) in MEMS structures. Mine is a fixed-fixed beam with a mass attached at the center of the beam. during electrostatic actuation it produce some ringing. I am using Intellisuite MEMS cad tool for the dynamic respose analysis of the structure. In which I have to mention mass and stiffness damping parameters to define the damping ratio according to the following equation.
ζ=(α/2ω)+(βω/2)
ζ=Damping ratio
α=Mass damping
β=Stifness damping
ω=Natural frequency
How to deduce α&β from the structural dimension of the above mentioned system.
I will be satisfied if anyone could help me.
Regards
