A MOS capacitor is going to have lousy linearity. So
that leaves you with a MIM, POP, MOM type capacitor
and all of these are pretty "decoupled" from FEOL
lithographic capability - your 180nm choice has not
much to do with it other than that MIM caps will scale
oxide thickness somewhat following the transistor
BVdss plus margin - how much, comes down to foundry
particulars.
The other thing about your caps is, they need the
switches and sense-amp loads to be trivial w.r.t.
the explicit LSB capacitor value. So you might want
to get a viable switch and charge amplifier figured
out first, and then find a LSB cap value that holds
net charge "well enough" when you look at the
assembly as a whole, by an optimization loop
(diminishing returns vs performance goals).