To design this, you really need an RF and process Engineer to define the characteristics and then choose a method suitable to the process variables.
Plasma imaginary impedance changes +/- reactance according the mix ratio of certain gasses used. It also changes according to the excitation frequency. but maximum power is transferred when reactance is minimized and the real impedance is matched to the source impedance. Typically 50 Ohms is used with Smith Chart analysis with swept frequencies.
In operation, conditions vary dynamically and of course there may be arcing interference noise while the power must be held constant with real impedance changing with current density according to the gap control and a stepper controlled vacuum air capacitor to balance phase. A working knowledge of Network Analyzers helps to understand how signals are generated, filtered, and noise rejected , in order to measure fundamental response apart from spurious noise and harmonics as well as induced resonance from spikes.
Always start any design with a well defined set of contraints, in this case for signal, noise and interference, as well as dynamic range of impedance, VSWR and current For this I suggest someone with RF engineer who also knows how to design the layout to avoid measurement errors, instrument the measurement system with drivers, detectors, directional couplers, mixers, filters, Balun, log amplifiers, then the measurement system is easier to define.
At the very minimum, you need a balun and directional coupler.
Otherwise you can expect fundamental problems. You aren't dealing with pure sine waves with constant voltage or current, here.