I'm having problem with calculating the capacitance of a capacitor that i designed in HFSS (i attached the simulation).
I measured the im{Z21} parameter and calculated the C with : C=-1/(2*pi*f*im{z21}.
When I calculated the approximate C with C=epsilon*d/A i got about 5pF, but with the second formula i get Farads!!
What Should I do?
P.S I'm not sure that the the ports i used are correct.
The way you defined your ports is wrong. A lumped port along with its integration line can be defined between a ground line (Lower metal) and a signal line (upper metal). When you do this properly you will get the value of capacitance in both cases equal to approximately 0.55pF. Attached please find the HFSS file.