dpal
Newbie

Hi! I am powering an inductively coupled plasma with a 13.56MHz RF PSU at around 300-500W. It is matched with an L matching network such that <10W are reflected, and connected to a water cooled 4-turn copper coil. It runs stably for maybe 20 minutes, but then melts through the several mm of PTFE in the coax between the coil antenna and the matching network (MN side) and shorts.
(this is just the insulation, ignore the red wire - it's the same with standard coax connectors)
This happens even with 0 reflected power and with thick insulation in the connectors. Sometimes it just happens after a certain time, sometimes as I'm slowly changing gas composition from argon to hydrogen.
What should I look into to diagnose the root cause?
(this is just the insulation, ignore the red wire - it's the same with standard coax connectors)
This happens even with 0 reflected power and with thick insulation in the connectors. Sometimes it just happens after a certain time, sometimes as I'm slowly changing gas composition from argon to hydrogen.
What should I look into to diagnose the root cause?