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I believe that fractal caps are patented.
BUT - if you would avoid the fractal part and just generate regular structure where the sidewall capacitance is > than area cap you will be ok.
Fractals - since it is random you would have to use a tool. I do believe it should not be a big deal to create something in cadence (skill coded simple fractal routine)
Again I would use regular structure and replicate it to avoid patent...
Thanks for reply, I have another question, how I estimate the
cpacitance of my design? I have the process parameter such as
the thickness of oxide between metals. Any method to estimate it?
Usually in e-specs for the process they mention the area capcitance and fringing capacitance for the layer. Use the fringing number for this kind of cap
In documents provided by foundry look for parasitic capacitances and sheet resistances. Arround that point you wil be able to find the fringing capacitance.
Since i do have feeling you are not very familiar with it you should probably spend day or two by reading the document through - no offense intended.
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