In my experience the "leakage" modeling always gets
hind teat when it comes to priorities, especially in a
"digital" flow.
Your current seems large and I hope you have at least
tried to do a probes-up I-V to de-embed any harness
and instrument leakage floor. And remembered to leave
the lights off, because exposed chips can have a lot
of photocurrent (relatively speaking) under ambient,
let alone micrscope illuminator, light input. A black tent
is a good idea. It's also possible that, on wafer, you
do not have full control of all device nodes, or that
the chuck has too much 60Hz hum on it and you're
rectifying that through the isolation junctions and
collecting the "bonus" current.
Leakage might be diode conduction or might be MOS
subthreshold conduction, DIBL / GIDL, etc. Some of
these are not well fittable by older models, and some
are subject to process variation and might only be
well represented at corner model conditions, if you
happen to have off-center material in hand.
That low voltage technology is also liable to not be
very resistant to handling overstress and you could
be inducing abnormal leakage by your test equipment
simply touching down while precharged, or walking in /
walking out leakage by repeatedly sweeping past or
through hot-carrier-inducing regions of operation.