Your using a large signal level and an attenuator will certainly work and has a high probability of success.
The next more clever way is to use a commercial amplifier module that is selected for S11 being very low.
If you have access to a microwave simulator that can do optimizations, design your own amplifier and optimize with S11 having a higher weighting than other parameters.
In all of the above cases, the reflection from the sending end of the line is important. What gets into your receiving end is the first pass signal and then the three pass signal (reflected from the load, going back to the source, and being reflected from the source. It is important that the amplifier and network at the source have the 50 ohm output impedance [S22 very low])
There is a second order effect where the load on the sending end amplifier not being the design value (due to the input impedance of the transmission line not being exactly 50 +j0 ohms due to the load not being exactly 50+j0 ohms) causes the linearity to decline.
Another second order effect is the S12 of the receiving amplifier. If the load on it is not exactly what it is designed for the input impedance will be different.