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resonator filter mems structure - need s parameter

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sundarmeenakshi

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resonator filter

i am planning to simulate this RF mems structure like this
i need to find s parameter.
which software i can use IE3D or ADS or HFSS. or ANSYS
 

resonator filter

I am just starting working on HFSS11 and I want to design a 9 cell elliptical rf cavity. is there any tutorial to start the work on HFSS to design any type of cavity? I will appreciate any kind of help.
 
Re: resonator filter

asaini said:
I am just starting working on HFSS11 and I want to design a 9 cell elliptical rf cavity. is there any tutorial to start the work on HFSS to design any type of cavity? I will appreciate any kind of help.
Click to expand...
no
 
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