eecs4ever
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For metal lines in the metal layers, why is Rs ( the sheet resistance, Ohms/square)
lower when the spacing between metal lines are larger?
For example, width = 0.2 um space = 2 um Rs=0.137 ohms/square
width = 0.2 um space = 0.2um Rs = 0.037 ohms/square
Thanks.
lower when the spacing between metal lines are larger?
For example, width = 0.2 um space = 2 um Rs=0.137 ohms/square
width = 0.2 um space = 0.2um Rs = 0.037 ohms/square
Thanks.