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lateral capacitor theory question

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yefj

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Hello, I am trying to find theory designing a 5pF capcitor with the following structure.
I google a lot and could find a good manual.Is there somewhere I could find a good manual for designing such structures?
Thanks.
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It's all fringing field and analytically messy even without the substrate and neighbor couplings.

If you don't have a blessed MOM cap Pcell and geometry effects modeled, expect poor accuracy in any calculations.

You would likely be better off with a multi-plate, but plate, cap structure where the majority of C is knowable from E-spec values (incl substrate to bottom plate dielectrics stack, as-planarized) if your technology has a tall backend. Use pcapacitors to represent if you mean to go all the way to real silicon.
 
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