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CDU? Critical Dimension Uniformity

 
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omsi



Joined: 24 Jan 2006
Posts: 93
Helped: 3
Location: Hyderabad,India
Post27 Aug 2008 12:12   CDU? Critical Dimension Uniformity
Hi,
Can anyone tell me what is CDU?
Why we should have in CHIP LEVEL LAYOUT?
I have found this in TSMC 90nm document.
Please breif me with any document.

Regards,
Krishna Kumar Movva.
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